Set the Gas Flow Rates for Chemical Adsorption
- Install a chemical adsorption sample tube with filler rod on the sample port.
Do not touch the quartz sample tube with your fingers. Finger moisture and grease will contaminate the quartz. At high temperatures, the contaminated quartz will disintegrate. |
- Open valves 1 and 9 and allow the sample tube to evacuate for at least 10 minutes to eliminate any outgassing.
- Backfill the manifold and sample tube with helium.
- Open the inlet port, CS, 5, 7, 9, and X.
- Use the regulator pressure control knob to set flow on the internal flow meter to approximately 60 to 80.
- Close inlet port.
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